Applied Physics Letters · 2005 · 95 citations · 6 references
Natural SciencesMaterials SciencePhysicsAcousticsThin FilmsAcoustic MaterialsAcoustic WavesAluminum NitrideLamb WavesNitride Thin FilmsNitrides DepositionNitrides Thin FilmsSurface Acoustic WavesSurface Waves
The basic principles and technology for the development of lateral-field-excited Lamb acoustic wave resonators on sputter-deposited c-oriented thin aluminum nitride films are presented. The experimental results demonstrate that Lamb waves can be successfully used as an alternative to high-velocity surface acoustic waves.
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Thierry Laurent, François O Bastien, Jean-Claude Pommier et al. · HAL (Le Centre pour la Communication Scientifique Directe) · 2000 · 66 citations