Concepedia

Surface cleaning of metals by pulsed-laser irradiation in air

Yongfeng Lu, Mineo Takai, Shuji Komuro, T. Shiokawa, Y. Aoyagi

Applied Physics A · 1994 · 81 citations · 10 references

DOI

Concepts

References

10

Laser-cleaning techniques for removal of surface particulates

A. C. Tam, W. P. Leung, Werner Zapka et al. · Journal of Applied Physics · 1992 · 413 citations

, , +15

Calorimetric and acoustic study of ultraviolet laser ablation of polymers

G. Gorodetsky, T. G. Kazyaka, R. L. Melcher et al. · Applied Physics Letters · 1985 · 131 citations

, , +16

Dry surface cleaning using CO2 snow

Robert Sherman, John Grob, Walter H. Whitlock · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 86 citations

, , +17

Incidence angle effect of a hydrogen plasma beam for the cleaning of semiconductor surfaces

I. Suemune, Yasuhiro Kunitsugu, Y. Kan et al. · Applied Physics Letters · 1989 · 50 citations

, , +17

Laser-Induced Dry Cleaning in Air–A New Surface Cleaning Technology in Lieu of Carbon Fluorochloride (CFC) Solvents

Yong-Feng Lu Aoyagi · Japanese Journal of Applied Physics · 1994 · 30 citations

, , +17