Publication | Closed Access
Diode-laser-based high-precision absolute distance interferometer of 20 m range
41
Citations
15
References
2009
Year
PhotonicsEngineeringMeasurementCalibrationLength MetrologyM RangeMeasurement UncertaintyInterferometryEducationFrequency SweepingSynthetic Wavelength InterferometryLaser-based SensorInstrumentationLaser FabricationOptical Engineering
We present a hybrid absolute distance measurement method that is based on a combination of frequency sweeping, variable synthetic, and two-wavelength, fixed synthetic wavelength interferometry. Both experiments were realized by two external cavity diode lasers. The measurement uncertainty was experimentally and theoretically demonstrated to be smaller than 12 microm at a measurement distance of 20 m.
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