Applied Optics · 2009 · 42 citations · 15 references
EngineeringElectrical EngineeringMetrologyOpticsOptoelectronicsDistance MeasurementInterferometryLaser DiodesMeasurement UncertaintyOptical InstrumentationOptical MetrologyExternal Cavity Laser DiodesExternal-cavity LasersInterferometric Length MeasurementInterferometric MeasurementInterferometric MetrologyLaser InterferometryLaser Metrology SystemsOptical Interferometry
We present a hybrid absolute distance measurement method that is based on a combination of frequency sweeping, variable synthetic, and two-wavelength, fixed synthetic wavelength interferometry. Both experiments were realized by two external cavity diode lasers. The measurement uncertainty was experimentally and theoretically demonstrated to be smaller than 12 microm at a measurement distance of 20 m.
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Two-wavelength laser interferometry using superheterodyne detection
R. Dändliker, R. Thalmann, D. Prongúê · Optics Letters · 1988 · 243 citations · Full text
Large-Scale Metrology – An Update
William T. Estler, K. L. Edmundson, G.N. Peggs et al. · CIRP Annals · 2002 · 242 citations
C. Polhemus · Applied Optics · 1973 · 223 citations