Wear · 2005 · 69 citations · 29 references
EngineeringMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsSurface CoatingsWear ResistanceWear-resistant MaterialsCoating CharacterizationCoating TribologyMagnetron SputteringMetallic CoatingsReactive SputteringTitanium Nitride CoatingsWearWear-resistant Coatings
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Thermal stability of nitride thin films
Lars Hultman · Vacuum · 2000 · 627 citations
Natural Sciences, Materials Engineering, Materials Science +12