Concepedia

Study of temperature rise during focused Ga ion beam irradiation using nanothermo-probe

Neeraj Shukla, Sarvesh K. Tripathi, Amit Banerjee, A. Sai Venkata Ramana, Nitul S. Rajput, V. N. Kulkarni

Applied Surface Science · 2009 · 48 citations · 16 references

DOI

Concepts

References

16

SRIM-2003

James F. Ziegler · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2004 · 1.5K citations

Focused ion beam technology and applications

J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 611 citations

, , +11

Recent developments in micromilling using focused ion beam technology

Ampere A. Tseng · Journal of Micromechanics and Microengineering · 2004 · 403 citations

, , +13

<i>High Resolution Focused Ion Beams: FIB and Its Applications</i>

Alfred Wagner · Physics Today · 2004 · 167 citations

, , +7

Reducing the resistivity of electron and ion beam assisted deposited Pt

R. M. Langford, Tian-Ke Wang, Doğan Özkaya · Microelectronic Engineering · 2007 · 118 citations

, , +9