Capacitive, inductive and helicon-wave modes of operation of a helicon plasma source

Abstract

Vector-rf-B-field measurements in the near-field of a helicon plasma source taken throughout the volume of the source are reported. Three distinct modes of operation of the helicon plasma source, capacitive, inductive, and helicon-wave, are identified by the structure of the plasma-wave-fields. Results are reported for a double-half-turn antenna, which is believed to be the first reporting for such an antenna structure in application to helicon-wave plasma sources. Comparison is made to a double-saddle-coil antenna which also demonstrates the distinct inductive and helicon-wave modes.