Patterned Growth and Transfer of ZnO Micro and Nanocrystals with Size and Location Control

Abstract

A method to fabricate and transfer crystalline ZnO with control over location, orientation, size, and shape is reported. The process uses an oxygen plasma treatment in combination with a photoresist pattern on magnesium-doped GaN substrates to define narrow nucleation regions and attachment points with 100 nanometer scale dimensions. Lateral epitaxial overgrowth follows nucleation to produce single-crystalline ZnO shown in the figure.