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Fabrication and characterization of optoelectronic near-field probes based on an SFM cantilever design

Materials ScienceElectrical EngineeringSfm Cantilever DesignEngineeringOptoelectronic Near-field ProbesMicrofabricationOptical PropertiesScanning Probe MicroscopyApplied PhysicsNano Electro Mechanical SystemInstrumentationMicro-optical ComponentOptoelectronicsNanolithography Method