Thickness determination for SiO2 films on Si by X-ray reflectometry at the Si K edge - Concepedia

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Thickness determination for SiO2 films on Si by X-ray reflectometry at the Si K edge

28

Citations

10

References

2004

Year

Michael Krumrey, Michael Hoffmann, G. Ulm, Peter Thomsen-Schmidt

Thin Solid Films

Materials ScienceSi K EdgeEngineeringSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationThickness DeterminationThin FilmsSilicon On InsulatorSio2 FilmsThin Film Processing

References

	Year	Citations

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