Wide continuous tuning range of 221 nm by InP/air-gap vertical-cavity filters

Abstract

Micromachined InP/air-gap based vertical-cavity filters, capable of wide and continuous tuning, are reported. An optimised epilayer growth procedure for strain control in InP/air-gap filter structure has been developed. The filter characteristics showed a wide continuous tuning range of 221 nm for the actuation voltage of 28 V.