The removal of nanoparticles from sub-micron trenches using megasonics

An Experimental Study of Megasonic Cleaning of Silicon Wafers

Ahmed Busnaina, Ismail Kashkoush, Glenn W. Gale · Journal of The Electrochemical Society · 1995 · 85 citations

Chemical Engineering, Wafer Scale Processing, Engineering +10

Effect of Fluid Flow on Convective Transport in Small Cavities

Richard C. Alkire, Hariklia Deligianni, Jeh‐Beck Ju · Journal of The Electrochemical Society · 1990 · 81 citations

Engineering, Interior Surface, Microfabrication +13

The adhesion-induced deformation and the removal of submicrometer particles

Sreenath Krishnan, Ahmed Busnaina, D. S. Rimai et al. · Journal of Adhesion Science and Technology · 1994 · 63 citations

Materials Science, Submicrometer Particles, Engineering +15

Convective Mass Transport from Rectangular Cavities in Viscous Flow

J. M. Occhialini, J. J. L. Higdon · Journal of The Electrochemical Society · 1992 · 32 citations · Full text

Numerical Analysis, Comprehensive Numerical Study, Unsteady Flow +12

Experimental and Analytical Study of Submicrometer Particle Removal from Deep Trenches

Kaveh Bakhtari, Rasim Guldiken, Ahmed Busnaina et al. · Journal of The Electrochemical Society · 2006 · 25 citations