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Improvement on surface texturing of single crystalline silicon for solar cells by saw-damage etching using an acidic solution

Materials ScienceEngineeringCrystalline DefectsMicrofabricationSurface ScienceApplied PhysicsSingle Crystalline SiliconSemiconductor Device FabricationSurface TexturingAcidic SolutionSilicon On InsulatorPlasma EtchingSurface ProcessingPhotovoltaicsSolar Cell Materials