Fabrication of GaN cantilevers on silicon substrates for microelectromechanical devices

Abstract

The fabrication of free-standing GaN cantilevers on Si(111) is demonstrated, and the growth of III-nitride epilayers on silicon (111) using an AlN buffer layer is characterized. Mechanically releasing GaN structures from Si(111) required a combination of two dry inductively coupled plasma etch processes using Cl2/Ar and CF4/Ar/O2 chemistries, and a potassium hydroxide (KOH) aqueous etch. Scanning transmission electron microscopy reveals a columnar growth habit for the nitrides. Electron energy loss spectroscopy imaging of an AlGaN/GaN interface indicates columnar growth may strongly influence the potential piezoelectric properties of III-nitride cantilever microelectromechanical devices.