Plasma and deposition enhancement by modified arc evaporation source

Electric sheath and presheath in a collisionless, finite ion temperature plasma

G.A. Emmert, R. Wieland, A. T. Mense et al. · The Physics of Fluids · 1980 · 347 citations

Collisionless Plasma, Engineering, Physics +13

Cathode spots and vacuum arcs

J.E. Daalder · Physica B+C · 1981 · 159 citations

Glow Discharge, Cathode Spots, Vacuum Plasma Technology

Plasma diagnostics with electric probes

R. M. Clements · Journal of Vacuum Science and Technology · 1978 · 116 citations

Engineering, Langmuir Probes, Plasma Science +18

Characteristics of titanium arc evaporation processes

Philip Martin, David R. McKenzie, R. P. Netterfield et al. · Thin Solid Films · 1987 · 110 citations

Materials Science, Engineering, Dewvaporation +5

Ion flux characteristics in arc vapor deposition of TiN

C. Bergman · Surface and Coatings Technology · 1988 · 84 citations

Ion Flux Characteristics, Applied Physics, Chemical Deposition +2