Thin Solid Films · 1979 · 26 citations · 3 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesThin FilmsMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsThin-film TransistorsCmos Fabrication ProcessesGate Dielectric EngineeringGate Oxide InterfacesGate Oxide Thickness EffectsThreshold Voltage
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J.C. Anderson · Thin Solid Films · 1976 · 21 citations