Interface formation and reactions at Ta–Si and Ta–SiO2 interfaces studied by XPS and ARXPS - Concepedia

Concepedia

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Interface formation and reactions at Ta–Si and Ta–SiO2 interfaces studied by XPS and ARXPS

54

Citations

8

References

2004

Year

M. Zier, Steffen Oswald, R. Reiche, K. Wetzig

Journal of Electron Spectroscopy and Related Phenomena

Oxide HeterostructuresMaterials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsInterface StructureTa–sio2 InterfacesInterface Formation

References

	Year	Citations

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