Statistics
Publications
3
Citations
155
H-Index
3
Active since
1992
Affiliations
Philip Catania is an author at IBM Research - Thomas J. Watson Research Center specializing in materials science, materials engineering, and film growth mechanisms.
Publications per year
1992–1993
3
3
Role of energetic atoms and ions in Ta films grown by different physical vapor deposition methods
R. Roy, Philip Catania, K. L. Saenger et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 39 citations
Natural Sciences, Materials Engineering, Materials Science +16
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