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Determination of the adhesion energy of MEMS structures by applying Weibull-type distribution function

Materials ScienceEngineeringMicromechanicsMechanical BehaviorMechanicsMicrofabricationMechanical EngineeringAdhesive MaterialSolid MechanicsMems StructuresWeibull-type Distribution FunctionMechanics Of MaterialsMicro-electromechanical SystemAdhesion EnergyStructural Adhesive