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Field emission from tetrahedral amorphous carbon
317
Citations
23
References
1997
Year
Materials ScienceOptical MaterialsSp3 ContentThreshold FieldEngineeringApplied PhysicsCarbon BlackField EmissionThin Film Process TechnologyThin FilmsAmorphous SolidVacuum DeviceThin Film Processing
Field emission has been measured from a series of tetrahedrally bonded amorphous carbon (ta-C) films produced by the filtered cathodic vacuum arc. The threshold field and current densities achievable have been studied as a function of their sp3 content and of nitrogen incorporation. Typical undoped ta-C films are found to have a threshold field of 10–20 V/μm, decreasing with increasing sp3 content, and optimally nitrogen doped films exhibit threshold fields as low as 3–5 V/μm.
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