Concepedia

Publication | Closed Access

Crackless linear through-wafer etching of Pyrex glass using liquid-assisted CO2 laser processing

DOI

21

Citations

12

References

2008

Year

C.K. Chung, Yu-Ching Sung, Guangyong Huang, Erik Hsiao, Wei‐Hung Lin, S.L. Lin
Applied Physics A

References

YearCitations

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