Preparation and properties of indium tin oxide films deposited on polyester substrates by reactive evaporation

Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering

T. Karasawa, Yutaka Miyata · Thin Solid Films · 1993 · 164 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of O2 pressure during deposition on properties of rf-sputtered Sn-doped In2O3 films

John C. C. Fan, Frank J. Bachner, G. Foley · Applied Physics Letters · 1977 · 128 citations

Natural Sciences, Materials Engineering, Materials Science +17

Preparation of Sn-doped In2O3 (ITO) films at low deposition temperatures by ion-beam sputtering

John C. C. Fan · Applied Physics Letters · 1979 · 72 citations

Natural Sciences, Materials Engineering, Materials Science +17

R.f. magnetron-sputtered indium tin oxide film on a reactively ion-etched acrylic substrate

Shu-Ta Hsieh · Thin Solid Films · 1993 · 63 citations

Natural Sciences, Materials Engineering, Materials Science +14

Properties of indium tin oxide thin films prepared by reactive evaporation

H.‐U. Habermeier · Thin Solid Films · 1981 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +16