Physica B Condensed Matter · 1999 · 41 citations · 12 references
EngineeringMaterials EngineeringMaterials ScienceMaterials ChemistrySemiconductor DevicesSemiconductor MaterialsInorganic MaterialsNitrogen OxidesSemiconductor Crystal GrowthSilicon MaterialsCzochralski Crystal GrowthSilicon Crystal GrowthSilicon DioxideSilicon Doping
12
Oxygen precipitation in silicon
A. Borghesi, B. Pivac, A. Sassella et al. · Journal of Applied Physics · 1995 · 488 citations
Natural Sciences, Materials Engineering, Materials Science +11