Concepedia

An analytical study of platinum silicide formation

J. B. Bindell, J. W. Colby, D. R. Wonsidler, J. M. Poate, D. K. Conley, T. C. Tisone

Thin Solid Films · 1976 · 55 citations · 8 references

DOI

Concepts

References

8

Principles and applications of ion beam techniques for the analysis of solids and thin films

J. W. Mayer, M‐A. Nicolet, T.M. Buck et al. · Thin Solid Films · 1973 · 332 citations

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Progress in analytic methods for the ion microprobe mass analyzer

Charles A. Andersen · International Journal of Mass Spectrometry and Ion Physics · 1969 · 194 citations

, , +13

Kinetics and mechanism of platinum silicide formation on silicon

J. M. Poate, T. C. Tisone · Applied Physics Letters · 1974 · 161 citations

, , +16

Interaction of Al layers with polycrystalline Si

Kunio Nakamura, M‐A. Nicolet, J. W. Mayer et al. · Journal of Applied Physics · 1975 · 84 citations

, , +16

The sputtering of PtSi and NiSi

J. M. Poate, W. L. Brown, Roger B. Homer et al. · Nuclear Instruments and Methods · 1976 · 78 citations

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