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Growth of thick AlN epilayers with droplet-free and atomically smooth surface by plasma-assisted molecular beam epitaxy using laser reflectometry monitoring

Materials ScienceAluminium NitrideSurface CharacterizationEngineeringLaser Reflectometry MonitoringOptical PropertiesSurface ScienceApplied PhysicsSmooth SurfaceLaser Processing TechnologyLaser-assisted DepositionMolecular Beam EpitaxyThick Aln Epilayers