Lithographic fabrication of large curved hologram by laser writer

Abstract

We fabricated a large curved computer-generated hologram pattern on the concave substrate with diameter of 110mm and radius of curvature of 504mm. The line width of the hologram varied form 39um to 810um. We adopt the single pass and the screw-lines to fabricate this curved hologram precisely and efficiently. 80% of the fabrication time is saved by this method. This work will be useful to the measurement of large convex secondary mirrors that is also hardness at present.