Concepedia

Publication | Closed Access

Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD

DOI

102

Citations

27

References

2005

Year

E. Vassallo, A. Cremona, F. Ghezzi, F. Dell’Era, L. Laguardia, G. Ambrosone, U. Coscia
Applied Surface Science

References

YearCitations

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