Concepedia

Ultra-thin Cr2O3 well-crystallized films for high transmittance APSM in ArF line

Fu‐Der Lai, Chia‐Yi Huang, Chih‐Yuan Chang, L. A. Wang

Microelectronic Engineering · 2003 · 31 citations · 6 references

DOI

Concepts

References

6

Characterization of sputter-deposited chromium oxide thin films

P. Hones, Matthieu Diserens, F. Lévy · Surface and Coatings Technology · 1999 · 174 citations

, , +12

Inversion of normal-incidence (R,T) measurements to obtain n + ik for thin films

Thomas C. Paulick · Applied Optics · 1986 · 81 citations

, , +16

Processing effects on the tribological characteristics of reactively sputtered chromium oxide (Cr2O3) overcoat films

A. S. Kao, M. Doerner, V. Novotný · Journal of Applied Physics · 1989 · 57 citations

, , +17

Multi-cathode unbalanced magnetron sputtering systems

William D. Sproul · Surface and Coatings Technology · 1991 · 36 citations

, , +6

<title>Materials screening for attenuating embedded phase-shift photoblanks for DUV and 193-nm photolithography</title>

P. F. Carcia, Roger H. French, Kenneth G. Sharp et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 16 citations

, , +17