Applied Physics Letters · 1974 · 48 citations · 2 references
Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureElectronic MaterialsSemiconductor MaterialsDefect CharacterizationDefectsDefects In Electronic MaterialsMicrostructure AnalysisSemiconductor DefectsSilicon MaterialsDislocation Loop FormationDislocation LoopsDislocation NetworksDislocationsSilicon DefectsSingle-crystal SiliconSwirlTransmission Electron Microscopy Of Dislocations
Swirl defects in as-grown silicon single crystals could be observed directly in a transmission electron microscope after application of a special sample preparation method. Complicated dislocation loops were found at positions of individual swirl defects which had been revealed as hillocks rather than as etch pits by a modified Sirtl etch.
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VACANCY CLUSTERS IN DISLOCATION-FREE SILICON
Anton Köck · Applied Physics Letters · 1970 · 119 citations