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VACANCY CLUSTERS IN DISLOCATION-FREE SILICON
119
Citations
4
References
1970
Year
Dislocation-free Silicon CrystalsElectrical EngineeringEngineeringDislocation InteractionPhysicsApplied PhysicsCondensed Matter PhysicsPlanar DiodesDefect FormationSemiconductor Device FabricationSilicon On InsulatorDefect ToleranceVacancy ClustersMicrostructureMicroelectronics
Dislocation-free silicon crystals made by the floating zone technique contain vacancy clusters formed during cooling of the crystal after growth. The distribution and concentration of these defects have been determined. A model is presented describing the formation of these clusters. The influence of vacancy clusters on the leakage current of planar diodes is investigated.
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