Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate - Concepedia

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Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate

32

Citations

23

References

2012

Year

Jan Musschoot, Jolien Dendooven, D. Deduytsche, J. Haemers, Guy Buyle, Christophe Detavernier

Surface and Coatings Technology

Materials ScienceEngineeringSurface ScienceApplied PhysicsSurface ModificationNon-woven Fibrous SubstrateChemical Vapor DepositionPlasma ProcessingAtomic Layer Deposition

References

	Year	Citations

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