Comparative study of etching high crystalline quality AlN and GaN

Weihua Guo, Jinqiao Xie, Christer‐Rajiv Akouala, Seiji Mita, A. Rice, James Tweedie, Isaac Bryan, Ramón Collazo, Zlatko Sitar

Journal of Crystal Growth · 2013 · 77 citations · 30 references

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