Publication | Closed Access
Comparative study of etching high crystalline quality AlN and GaN
76
Citations
30
References
2013
Year
Materials EngineeringMaterials ScienceAluminium NitrideEngineeringApplied PhysicsAluminum Gallium NitrideComparative StudyGan Power DeviceCategoryiii-v SemiconductorPlasma EtchingOptoelectronics
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