Publication | Open Access
Influence of asymmetric etching on ion track shapes in polycarbonate
16
Citations
14
References
2007
Year
Materials EngineeringMaterials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabricationSurface ScienceApplied PhysicsPolymer ScienceMicroelectronicsPlasma EtchingPlasma ProcessingIon Track ShapesNanolithography Method
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