Vacuum · 2007 · 21 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologyThin FilmsElectron MicroscopyNanocompositesThin Film Electrical PropertiesThin Film Surface MorphologyThin-film MaterialsTransmission Electron MicroscopyThin-film Nanostructures
6
Structure of sputtered nanocomposite CrCx∕a-C:H thin films
Gert Gassner, Jörg Patscheider, P.H. Mayrhofer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 52 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17