Materials science forum · 2011 · 12 citations · 20 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsSurface ScienceThin FilmsOptical Thin FilmsThin Film Electrical PropertiesThin Film Optical PropertiesThin Film Surface MorphologyThin-film DepositionThin-film MaterialsAluminum-doped Zinc OxideMagnetron SputteringOptical PropertiesSubstrate EffectsSurface Optical PropertiesThin Oxide FilmsThin Oxide LayersWork Function
Hydrogen doped AZO films (HAZO) were prepared by RF magnetron sputtering. A systematic study of the effect of substrate to target distance (Dst) on the structural, electrical and optical properties of the as-grown HAZO films was carried out. Compared with the Al-doped ZnO films, the hydrogen in the atmosphere influenced the growth of the films by incorporating in the films and bombarding the surface of the film, namely, the Dst, which induced the residual stress and the roughness of the films decreased with an increase of the Dst. The films showed a smaller grain size. The surface work function of the films changed with the composition of the films, reaching a maximum at 7.5cm.
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Hydrogen as a Cause of Doping in Zinc Oxide
Chris G. Van de Walle · Physical Review Letters · 2000 · 2.2K citations · Full text
RETRACTED: Recent progress in processing and properties of ZnO
S. J. Pearton, D. P. Norton, K. Ip et al. · Progress in Materials Science · 2004 · 1.7K citations
Natural Sciences, Materials Engineering, Materials Science +8