Concepedia

Structural parameter sensitivity analysis of cantilever- and bridge-type accelerometers

Ádám Kovács

Sensors and Actuators A Physical · 2001 · 30 citations · 3 references

DOI

Concepts

References

3

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

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Electrostatic forces and their effects on capacitive mechanical sensors

Robert Puers, Daniel Lapadatu · Sensors and Actuators A Physical · 1996 · 97 citations

, , +14

Design optimization for cantilever-type accelerometers

H. Seidel, L. Csepregi · Sensors and Actuators · 1984 · 44 citations

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