Publication | Open Access
Investigation of oxidation-induced strain in a top-down Si nanowire platform
16
Citations
3
References
2009
Year
Materials ScienceNanoscale ScienceElectrical EngineeringEngineeringNanomaterialsNanotechnologyApplied PhysicsNanoscale ModelingSemiconductor Device FabricationOxidation-induced StrainSilicon On InsulatorNanomechanics
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