Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

T. Katoh, Daichi Yamaguchi, Yuko Satoh, Shigetoshi Ikeda, Yasushi Aoki, Masakazu Washio, Yoneho Tabata

Applied Surface Science · 2002 · 28 citations · 11 references

Concepts

References

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