Publication | Closed Access
Very small (⪸ 20 nm) lithographic wires, dots, rings, and tunnel junctions
93
Citations
22
References
1988
Year
EngineeringTunneling MicroscopyPhysicsElectron-beam LithographyNanotechnologyBeam LithographyApplied PhysicsTunnel JunctionsNanometrologyLithographic Wires⪸ 20Nanolithography Method
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