SnO2 Nanocrystalline Thin Films by XPS

Abstract

SnO2 nanocrystalline thin films are deposited on Al2O3 and SiO2/Si(100) by chemical vapor deposition starting from diethylaminodimethylstannane (IV) [(CH3)2Sn(N(C2H5)2)2]. X-ray photoelectron spectra of the principal core levels for the surface of a SnO2 film on SiO2/Si(100) are presented.