Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 13 citations · 0 references
ComputingHigh-performance ComputingPhysicsComputational PhysicsParallel ComputingScientific ComputingComputational ModelingDevice SimulationMonte Carlo MethodsMonte Carlo SimulationPipeline ParallelismSimulation MethodsComputation SpeedMonte Carlo AnalysisMonte Carlo Electron TransportParallel Monte Carlo Algorithms
A Monte Carlo program suited for a parallel pipeline computer has been developed. About 100 times faster simulation than that obtainable with a general purpose computer with 10 MIPS handling capacity was achieved. Thanks to high computation speed, restriction on objective structures for simulation was practically eliminated. A three-dimensional Monte Carlo program simulates the backscattered electron signals from a contact hole which could not previously be calculated in a reasonable computation time.