Publication | Closed Access
Raman scattering study of ion implanted and C.W.-Laser annealed polycrystalline silicon
36
Citations
4
References
1981
Year
Materials ScienceIon ImplantationEngineeringOptical PropertiesApplied PhysicsLaser ApplicationsPolycrystalline SiliconLaser-assisted DepositionSilicon On Insulator
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