Characterization of a radio frequency glow discharge emission source

Plasma potentials of 13.56-MHz rf argon glow discharges in a planar system

Klaus Köhler, J. W. Coburn, D. E. Horne et al. · Journal of Applied Physics · 1985 · 399 citations

Natural Sciences, Physics, Electromagnetics +13

Radio frequency powered glow discharge atomization/ionization source for solids mass spectrometry

Douglas C. Duckworth, R. Kenneth Marcus · Analytical Chemistry · 1989 · 168 citations

Natural Sciences, Chemistry, Analytical Chemistry +8

A New Technique for the Elemental Analysis of Thin Surface Layers of Solids

J. W. Coburn, E. Kay · Applied Physics Letters · 1971 · 103 citations

Natural Sciences, Chemistry, Materials Science +17

Glow-discharge mass spectrometry—Technique for determining elemental composition profiles in solids

J. W. Coburn, E. Taglauer, E. Kay · Journal of Applied Physics · 1974 · 103 citations

Natural Sciences, Chemistry, Materials Science +17

Radio frequency sputtering—the significance of power input

C. M. Horwitz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1983 · 51 citations

Engineering, Electrical Engineering, Materials Engineering +15