Publication | Closed Access
Maskless fabrication of nanoelectrode structures with nanogaps by using Ga focused ion beams
31
Citations
11
References
2004
Year
Materials ScienceIon ImplantationEngineeringMaskless FabricationElectron-beam LithographyMicrofabricationNanotechnologyNanomaterialsNanoelectrode StructuresApplied PhysicsIon BeamsBeam LithographyIon BeamNanofabricationNanolithography Method
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