Publication | Closed Access
Metalorganic chemical vapor deposition of very thin Pb(Zr,Ti)O<sub>3</sub> thin films at low temperatures for high-density ferroelectric memory applications
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Citations
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References
2001
Year
Materials ScienceThin PbLow TemperaturesEngineeringFerroelectric ApplicationSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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