Concepedia
Journal of The Electrochemical Society · 1972 · 60 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEtching ProcessesSemiconductor Device MaterialsWide-bandgap Semiconductor DevicesWide-bandgap SemiconductorsEtch ChemistryEtch MechanismsGallium Nitride (Gan) Materials