Concepedia

Formation of carbon-excess SiC from pyrolysis of CH3SiCl3

F. Kobayashi, Katsuichi IKAWA, Kazumi IWAMOTO

Journal of Crystal Growth · 1975 · 24 citations · 2 references

DOI

Concepts

References

2

Deposition and Microstructure of Vapor‐Deposited Silicon Carbide

T.D. Gulden · Journal of the American Ceramic Society · 1968 · 72 citations

, , +17

On the formation of β-SiC from pyrolysis of CH3SiCl3 in hydrogen

A. W. C. van Kemenade, C.F. Stemfoort · Journal of Crystal Growth · 1972 · 26 citations

, , +8