Publication | Closed Access
Design of a six-axis micro-scale nanopositioner—μHexFlex
94
Citations
10
References
2006
Year
Materials ScienceEngineeringMicromachinesNanomaterialsMicrofabricationNanotechnologyNanofabricationMicropositioningNano ScaleSix-axis Micro-scale Nanopositioner—μhexflex
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