Publication | Closed Access
Fabrication of self-encapsulated nickel microchannels and nickel nanowalls by reactive ion etching
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Citations
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References
2008
Year
Materials ScienceEngineeringSelf-encapsulated Nickel MicrochannelsMicrofabricationMaterials FabricationNanomaterialsNanotechnologyApplied PhysicsNanofluidicsNickel NanowallsMicroscale SystemNanofabricationMicrofluidicsPlasma EtchingNanolithography MethodReactive Ion
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