Journal of the American Ceramic Society · 1963 · 37 citations · 1 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistryMaterials ProcessingAluminum OxidesCrystal ChemistryCrystallographyEtching ProcessesPolishing OperationsSemiconductor SurfacesChemical EtchingEtch ChemistryEtchingPolishingPolishing Processes
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