Crystallinity properties of parylene-n affecting its use as an ILD in submicron integrated circuit technology - Concepedia

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Crystallinity properties of parylene-n affecting its use as an ILD in submicron integrated circuit technology

16

Citations

8

References

1995

Year

Xinshu Zhang, S. Dabral, Chien Chiang, J. F. McDonald, Bin Wang

Thin Solid Films

Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringApplied PhysicsCircuit TechnologyCrystallinity PropertiesMicroelectronicsCrystallography

References

	Year	Citations

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